Перевод: с английского на немецкий

plasma-etch reactor

Microelectromechanical systems — (MEMS) (also written as micro electro mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems) is the technology of very small mechanical devices driven by electricity; it merges at the nano scale into… … Wikipedia
Fernald Feed Materials Production Center — The Fernald Feed Materials Production Center (commonly referred to simply as Fernald) was a uranium processing facility located near the rural town of Fernald, in Hamilton County, Ohio, about 20 miles northwest of Cincinnati, which fabricated… … Wikipedia
Chlorine trifluoride — Systematic name … Wikipedia